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Pfeiffer IMR 265 热阴极离子真空计

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产品名称: Pfeiffer IMR 265 热阴极离子真空计
产品型号: Pfeiffer IMR 265
产品展商: PFEIFFER
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简单介绍

图中的是Pfeiffer IMR 265 热阴极离子真空计 Pfeiffer IMR 265 热阴极离子真空计测量精度高,达到2%


Pfeiffer IMR 265 热阴极离子真空计  的详细介绍
按工业标准的定义,真空 (Vacuum) 就是 “ 低于一个标准大气压的气体充满空间的状态 ” 。如图 1 : Overview of vacuum ,随着压力或单位体积内分子数的减少,真空度的大小各不相同。

真空度的单位与压强的单位一样,用 Pa , mbar 等表示。有两种表示方式:绝对真空度与相对真空度。一般说,用绝对真空度比较好理解,即准确说出当前的压力和压强是多少。对高低不同的真空进行测量,所依据的原理也各不相同。

一、低真空度的测量原理

低真空度是指 1000 mbar ~ 1 mbar 范围内的真空。此范围内,由压强变化引起的压力变化比较明显,可以通过测 量力的变化来测量出真空度,如:薄膜真空计,通过应力片,感知设计好的薄膜上力的变化,得知当前的真空度。如 Pfeiffer 的 CPT100 及 APR 系列 , 就应用了 Piezo 膜应力片,来检知压力的细微变化,从而测量出真空度。 电容真空计,由于压力不同,会引起电容两极距离的变化,这会使电容的大小发生变化。这样通过测量这种电容大小的变化,就能得知当前的真空度。如 Pfeiffer 的 CMR 系列。

二、中真空度的测量原理

中真空度是指 1 mbar ~ 1*10 -3 mbar 范围内的真空。此范围内,压力的绝对大小变的不容易测得,但空气的热传导能力显的很有特点。这样也有两种方法可以测量出真空度:电容真空计 (capacitance manometer) 通过调节预设压力的大小,电容真空计可以完成中真空度范围的测量。在 Pfeiffer 的 CMR 系列中, CMR 275 可测到 10 -5 mbar 数量级。 皮拉尼( Pirani )真空计,中真空度条件下,空气流动的方式是层流,热传导能力与真空度线性对应。因此可以通过测量恒温电阻丝上的电流大小,测得真空度。如 Pfeiffer 的 TPR 系列,及一系列复合真空计中的低中真空探头,都是采用的 Pirani 管。

三、高真空度或超高真空度的测量原理

高真空是指 1*10 -3 mbar ~ 1*10 -7 mbar 范围内的真空,超高真空是指 1*10 -7 mbar ~ 1*10 -11 mbar 范围内的真空。在这样的范围内,再去通过测量压力的大小来测量压强,测量的精度及可靠性,就比较难实现。压强的大小一方面体现为力的大小,另一方面还体现为单位体积内分子数的多少。在高真空条件下,可以通过计量单位体积内分子数的多少,来测知当前的真空度。那么如何获得单位体积内的分子数呢?我们知道:电子在相同的电子能量,相同的磁场中,所引起的分子电离电流越大,说明分子数密度越大。离子真空计就是在高真空条件下,通过计量分子电离电流的大小来测得分子数密度,从而测得真空度。

离子真空计有两种形式:冷阴极离子真空计( Cold cathode ionization vacuum gauge ),是通过加在阴阳两极间的高电压( 3 kv 左右),激出电子,同时这个电场又给了电子能量,用具有一定能量的电子去电离空气分子。为了提高灵敏度,使得到的电离电流尽可能的大,一般将阴极做成空心圆柱状,将针状的阳极放在阴极中间,同时在阴极外围设置磁场。这样的条件下,电子的运动路径会形成螺旋状,电离空气的机会大大增加,这样就使得电离的电流尽可能的大,提高了真空计的灵敏度及精度。Pfeiffer 的冷阴极离子真空计 IKR 系列,测量范围为: 1*10 -2 mbar ~ 1*10 -11 mbar ,精度为: ± 30% reading ,重复精度: ± 5%.

热阴极离子真空计 (Hot cathode ionization vacuum gauge) ,是通过加热阴极,激出电子,再设置一定的电场( 100 v 左右),给电子一定的能量,去电离空气分子。热阴极离子真空计在收集电离电流方面与冷阴极离子真空计有一些区别,并不是计量阴阳两极间的电流,而是另外设置了电流收集器( ion collector ) , 结构比较复杂,但测量精度特别是重复精度也相应提高,如 Pfeiffer 的 IMR 265 ,重复精度达到了 2% reading 。离子真空计的使用需要注意:1. 测得的真空度与分子的种类有关。因为不同的气体,被电离的能力不一样,读取的真空度并不是最后的结果,需要按给定的系数进行转换后,才能得到正确的结果。为 Pfeiffer 的冷阴极离子真空计 IKR / PKR 系列,在 10 -5 mbar 条件下的转换公式及转换系数:Pfeiffer 的冷阴极离子真空计 IKR 系列,测量范围为: 1*10 -2 mbar ~ 1*10 -11 mbar ,精度为: ± 30% reading ,重复精度: ± 5%.热阴极离子真空计 (Hot cathode ionization vacuum gauge) ,是通过加热阴极,激出电子,再设置一定的电场( 100 v 左右),给电子一定的能量,去电离空气分子。热阴极离子真空计在收集电离电流方面与冷阴极离子真空计有一些区别,并不是计量阴阳两极间的电流,而是另外设置了电流收集器( ion collector ) , 结构比较复杂,但测量精度特别是重复精度也相应提高,如 Pfeiffer 的 IMR 265 ,重复精度达到了 2% reading 。

离子真空计的使用需要注意:1. 测得的真空度与分子的种类有关。因为不同的气体,被电离的能力不一样,读取的真空度并不是最后的结果,需要按给定的系数进行转换后,才能得到正确的结果

Pfeiffer IMR265真空规管实拍图
中山共享光电真空技术有限公司可以供应的德国普发真空规管的型号及规格如下: Pfeiffer Vacuum Gauge:

TPR 010                        Pirani gauge                   DN 10 ISO-KF                  
TPR 010                        Pirani gauge                   DN 10 ISO-KF                  
TPR 010                        Pirani gauge                   DN 10 ISO-KF                  
TPR 010                        Pirani gauge                   DN 10 ISO-KF                  
TPR 017                        Pirani gauge                   DN 16 ISO-KF                  
TPR 017                        Pirani gauge                   DN 16 CF-F                    
TPR 018                        Pirani gauge                   DN 16 ISO-KF                  
TPR 018, Pirani gauge          DN 16 ISO-KF, suitable for UHV calibrated according to       
TPR 018                        Pirani gauge                   DN 16 CF-F                    
TPR 018                        Pirani gauge                   DN 40 CF-F                    
IKR 050                        Cold cathode gauge             DN 25 ISO-KF                  
IKR 050                        Cold cathode gauge             DN 40 ISO-KF                  
Exchange-IKR 050               Cold cathode gauge             DN 40 ISO-KF                  
IKR 050                        Cold cathode gauge             DN 40 CF-F                    
IKR 060                        Cold cathode gauge             DN 40 CF-F                    
Exchange-IKR 060               Cold cathode gauge             DN 40 CF-F                    
IKR 060                        Cold cathode gauge             DN 40 ISO-KF                  
IKR 070                        Cold cathode gauge             DN 40 ISO-KF                  
IKR 070                        Cold cathode gauge             DN 40 CF-F                    
Exchange-IKR 070               Cold cathode gauge             DN 40 CF-F                    
IKR 270, Active                Cold Cathode Transmitter       DN 40 CF-F, metal sealed      
IKR 270, Active, Cold Cathode  Transmitter DN 40 CF-F         metal sealed, calibrated      
IKR 270, Active                cold cathode Transmitter       DN 40 CF-F, metal sealed      
Exchange-IKR 270, Active       cold cathode Transmitter       DN 40 CF-F, metal sealed      
TPR 281                        Compact Pirani Gauge           DN 16 ISO-KF, calibrated      
TPR 281                        Active Pirani Transmitter      DN 16 ISO-KF                  
TPR 281                        Active Pirani Transmitter      DN 16 CF-R                    
TPR 281                        Active Pirani Transmitter      DN 16 ISO-KF, 250 °C          
TPR 281                        Active Pirani Transmitter      DN 16 CF-R, 250 °C            
Exchange-CMR 261, Active       Capacitance Transmitter        DN 16 ISO-KF                  
CMR 262, Active                Capacitance Transmitter        Cajon 8 VCR                   
Exchange-CMR 263, Active       Capacitance Transmitter        DN 16 ISO-KF                  
CMR 263, Active                Capacitance Transmitter        DN 16 CF-R                    
Exchange-CMR 263, DN 16 CF     Capacitance Transmitter        Cajon 8 VCR                   
CMR 361, Active                Capacitance Transmitter        tube AD 1/2"                  
CMR 361, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 361, Active Capacitive     Transmitter                    DN 16 ISO-KF, 0,1-1100mbar    
CMR 361                        Active Capacitance Transmitter DN 16 CF-R                    
CMR 361                        Active Capacitance Transmitter Range: 0,1 - 1100 mbar        
CMR 362, Active                Capacitance Transmitter        tube AD 1/2"                  
CMR 362                        Active Capacitance Transmitter DN 16 ISO-KF                  
CMR 362                        Active Capacitance Transmitter DN 16 ISO-KF, 0,01 - 110 mbar 
CMR 362                        Active Capacitance Transmitter DN 16 CF-R                    
CMR 362, Active                Capacitance Transmitter        Cajon 8 VCR                   
CMR 363, Active                Capacitance Transmitter        tube AD 1/2"                  
CMR 363                        Active Capacitance Transmitter DN 16 ISO-KF                  
CMR 363                        Active Capacitance Transmitter DN 16 CF-R                    
CMR 363                        Active Capacitance Transmitter Range: 0,001 - 11 mbar        
CMR 364                        Active Capacitance Transmitter tube OD 1/2"                  
CMR 364                        Active Capacitance Transmitter DN 16 ISO-KF                  
CMR 364                        Active Capacitance Transmitter DN 16 ISO-KF, 0,0001- 1,1 mbar
CMR 364                        Active Capacitance Transmitter DN 16 CF-R                    
CMR 364, Active                Capacitance Transmitter        Cajon 8 VCR                   
CMR 365, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 365, Active                Capacitance Transmitter        DN 16 CF-R                    
CMR 365, Active                Capacitance Transmitter        Cajon 8 VCR                   
Exchange-CMR 273, Active       Capacitance Transmitter        DN 16 ISO-KF                  
CMR 371, Active                Capacitance Transmitter        tube OD 1/2"                  
CMR 371, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 371, Active                Capacitance Transmitter        DN 16 ISO-KF, 0,1 - 1100 mbar 
CMR 371, Active                Capacitance Transmitter        DN 16 CF-R                    
CMR 371, Active                Capacitance Transmitter        Cajon 8 VCR                   
CMR 372, Active                Capacitance Transmitter        tube OD 1/2"                  
CMR 372, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 372, Active                Capacitance Transmitter        DN 16 ISO-KF, 0,01 - 110 mbar 
CMR 372, Active                Capacitance Transmitter        DN 16 CF-R                    
CMR 372, Active                Capacitance Transmitter        Cajon 8 VCR                   
CMR 373, Active                Capacitance Transmitter        tube AD 1/2"                  
CMR 373, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 373, Active                Capacitance Transmitter        DN 16 CF-R                    
CMR 373, Active                Capacitance Transmitter        Cajon 8 VCR                   
CMR 374, Active                Capacitance Transmitter        tube AD 1/2"                  
CMR 374, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 274, Active                Capacitance Transmitter        DN 16 CF-R                    
CMR 374, Active                Capacitance Transmitter        Cajon 8 VCR                   
CMR 375, Active                Capacitance Transmitter        tube AD 1/2"                  
CMR 375, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CMR 375, Active                Capacitance Transmitter        DN 16 CF-R                    
CMR 375, Active                Capacitance Transmitter        Cajon 8 VCR                   
IKR 251, Active                Cold Cathode Transmitter       DN 25 ISO-KF                  
IKR 251, Active                Cold Cathode Transmitter       DN 25 ISO-KF, calibrated      
IKR 251, Active                Cold Cathode Transmitter       DN 25 ISO-KF, calibrated      
Exchange-IKR 251, Active       Cold Cathode Transmitter       DN 25 ISO-KF                  
IKR 251, Active                Cold Cathode Transmitter       DN 40 ISO-KF                  
IKR 251, Active                Cold Cathode Transmitter       DN 40 CF-F                    
Exchange-IKR 251, Active       Cold Cathode Transmitter       DN 40 CF-F                    
IKR 261, Active                Cold Cathode Transmitter       DN 40 ISO-KF                  
IKR 261, Active                Cold Cathode Transmitter       DN 40 CF-F                    
IKR 261, Active                Cold Cathode Transmitter       DN 40 CF-F                    
PKR 251, Active Pirani/        Cold Cathode Transmitter       DN 25 ISO-KF                  
PKR 251, Active, Pirani/       Cold Cathode Transmitter       DN 25 ISO-KF, calibrated      
Exch-PKR 251, Active, Pirani/  Cold Cathode Transmitter       DN 25 ISO-KF                  
PKR 251, Active, Pirani/       Cold Cathode Transmitter       DN 40 ISO-KF                  
PKR 251, Active, Pirani/       Cold Cathode Transmitter       DN 40 ISO-KF                  
PKR 251, Active, Pirani/       Cold Cathode Transmitter       DN 40 ISO-KF, calibrated      
PKR 251, Active, Pirani/       Cold Cathode Transmitter       DN 40 CF-F                    
PKR 251, Active, Pirani/       Cold Cathode Transmitter       DN 40 CF-F, calibrated        
Exch-PKR 251, Active, Pirani/  Cold Cathode Transmitter       DN 40 CF-F                    
PKR 261, Active, Pirani/       Cold Cathode Transmitter       DN 25 ISO-KF                  
PKR 261, Active, Pirani/       Cold Cathode Transmitter       DN 40 ISO-KF                  
PKR 261, Active, Pirani/       Cold Cathode Transmitter       DN 40 CF-F                    
IMR 265, Active                Hot Cathode Transmitter        DN 25 ISO-KF                  
IMR 265, Active                Hot Cathode Transmitter        DN 40 ISO-KF                  
Exchange-IMR 265, Active       Hot Cathode Transmitter        DN 40 ISO-KF                  
IMR 265, Active                Hot Cathode Transmitter        DN 16 CF-F                    
IMR 265, Active                Hot Cathode Transmitter        DN 40 CF-F                    
Exchange-IMR 265, Active       Hot Cathode Transmitter        DN 40 CF-F                    
IMR 265, Active                Hot Cathode Transmitter        DN 16 ISO-KF                  
Exchange-IMR 265, Active       Hot Cathode Transmitter        DN 16 ISO-KF                  
TPR 270, Active                Compact Pirani Gauge           DN 16 ISO-KF, calibrated      
TPR 270, Active                Compact Pirani Gauge           DN 16 ISO-KF                  
PCR 260, Active                Pirani/Capacitance Transmitter DN 16 ISO-KF, 80°C            
PCR 260, Active                Pirani/Capacitance Transmitter DN 16 ISO-KF, 80°C, calibrated
PCR 260, Active                Pirani/Capacitance Transmitter DN 16 ISO-KF, 80°C            
PCR 260, Active                Pirani/Capacitance Transmitter DN 16 CF-F, 80°C              
PCR 260, Active                Pirani/Capacitance Transmitter 1/8"-NPT                      
TPR 280, Active                Pirani Transmitter             DN 16 ISO-KF, 80°C, calibrated
TPR 280, Active                Pirani Transmitter             DN 16 ISO-KF, 80°C            
TPR 280, Active                Pirani Transmitter             DN 16 ISO-KF, 80°C            
TPR 280, Active                Pirani Transmitter             DN 16 CF-F, 80°C              
TPR 280, Active                Pirani Transmitter             NPT 1/8"-connection           
TPR 280, Active                Pirani Transmitter             Cajon 8 VCR                   
TPR 280, Active                Pirani Transmitter             DN 16 ISO-KF, 250°C           
TPR 280, Active                Pirani Transmitter             DN 16 CF-F, 250°C             
PBR 260, Active, Pirani/       Bayard-Alpert Transmitter      DN 25 ISO-KF                  
Exch-PBR 260, Active, Pirani/  Bayard-Alpert Transmitter      DN 25 ISO-KF                  
PBR 260, Active, Pirani/       Bayard-Alpert Transmitter      DN 40 ISO-KF                  
PBR 260, Active, Pirani/       Bayard-Alpert Transmitter      DN 40 CF-R                    
Exch-PBR 260, Active, Pirani/  Bayard-Alpert Transmitter      DN 40 CF-R                    
CCR 263, Active                Capacitance Transmitter        tube AD 1/2"                  
CCR 361, Active                Capacitance Transmitter        tube OD 1/2"                  
CCR 361, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CCR 361, Active                Capacitance Transmitter        Cajon 8 VCR                   
CCR 362                        Active Capacitance Transmitter Tube OD 1/2"                  
CCR 362                        Active Capacitance Transmitter DN 16 ISO-KF                  
CCR 362                        Active Capacitance Transmitter Cajon 8 VCR                   
CCR 363, Active                Capacitance Transmitter        tube OD 1/2"                  
CCR 363, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CCR 363, Active                Capacitance Transmitter        DN 16 CF-R                    
CCR 363, Active                Capacitance Transmitter        Cajon 8 VCR                   
CCR 364                        Active Capacitance Transmitter Tube AD 1/2"                  
CCR 364                        Active Capacitance Transmitter DN 16 ISO-KF                  
CCR 364, Active                Capacitance Transmitter        DN 16 CF-R                    
CCR 364, Active                Capacitance Transmitter        Cajon 8 VCR                   
CCR 364                        Active Capacitance Transmitter tube AD 1/2"                  
CCR 365, Active Capacitance    Transmitter, DN 16 ISO-KF      Range: 0.00001 - 0.1 Torr     
CCR 365, Active Capacitance    Transmitter, DN 16 CF-R        Range: 0.00001 - 0.1 Torr     
CCR 365, Active Capacitance    Transmitter,  Cajon 8 VCR      Range: 0.00001 - 0.1 Torr     
CCR 361, Active Capacitance    Transmitter, Accuracy 0.15%    FlangeCajon 8 VCR             
CCR 362, Active Capacitance    Transmitter, Accuracy 0.15%    FlangeCajon 8 VCR             
CCR 373, Active Capacitance    Transmitter, DN 16 CF-R        Range: 0.001 - 10 Torr        
CCR 373, Active Capacitance    Transmitter,  Cajon 8 VCR      Range: 0.001 - 10 Torr        
CCR 374, Active                Capacitance Transmitter        DN 16 ISO-KF                  
CCR 375, Active Capacitance    Transmitter, DN 16 ISO-KF      Range: 0.00001 - 0,1 Torr     
CCR 375, Active Capacitance    Transmitter,  Cajon 8 VCR      Range: 0.00001 - 0,1 Torr     
CPT 100                        Digital Piezo Transmitter      DN 16 ISO-KF                  
CPT 100, Digital Piezo         Transmitter, DN 16 ISO-KF      2000 - 1 mbar, calibrated     
CPT 100                        Digital Piezo Transmitter      G 1/4"                        
RPT 100, Digital               Piezo/Pirani Transmitter       DN 16 ISO-KF                  
RPT 100, Digital Piezo/Pirani  Transmitter, DN 16 ISO-KF      1200 - 1E-4 mbar, calibrated  
RPT 100, Digital               Piezo/Pirani Transmitter       DN 16 ISO-KF, 1200 - 1E-4 mbar
RPT 100, Digital               Piezo/Pirani Transmitter       DN 16 CF-F                    
PPT 100 W                      Digital Pirani Transmitter     DN 16 ISO-KF                  
PPT 100 W                      Digital Pirani Transmitter     DN 16 ISO-KF, 1000 - 1E-4 mbar
Exchange-PPT 100 W             Digital Pirani Transmitter     DN 16 ISO-KF                  
PPT 100 W CF                   Digital Pirani Transmitter     DN 16 CF-F                    
HPT 100, Digital Pirani/       Bayard-Alpert Transmitter      DN 40 ISO-KF                  
HPT 100, Digital Pirani/       Bayard-Alpert Transmitter      DN 40 ISO-KF, 1000 - 1E-9 mbar
Exch-HPT 100, Digital Pirani/  Bayard-Alpert Transmitter      DN 40 ISO-KF                  
Exchange HPT 110, BA/Pirani    pressure transmitter, special  DN 40 ISO-KF                  
HPT 100, Digital Pirani/       Bayard-Alpert Transmitter      DN 40 CF-F                    
Exchange-HPT 100               Hot cathode Pirani transmitter DN 40 CF-F                    
HPT 100, BA/Pirani-CF flange   Pressure Transmitter with      CF/KF Adapter,1000 - 1E-9 mbar
MPT 100, Digital Pirani        Cold Cathode Transmitter       DN 25 ISO-KF                  
Exchange-MPT 100, Digital      Pirani ColdCathode Transmitter DN 25 ISO-KF                  
MPT 100, Digital Pirani        Cold Cathode Transmitter       DN 40 ISO-KF                  
MPT 100, Digital Pirani        Cold Cathode Transmitter       DN 40 ISO-KF,1000-5.10E-9 mbar


Pfeiffer IMR 265 热阴极离子真空计测量精度高,达到2%, 
Pfeiffer IMR265德国普发真空规管实拍图片:

Pfeiffer IMR265德国普发真空规管图片2:


 

有任何需要Pfeiffer IMR265真空规管的,请随时联系我们:
联系人:
徐中武       Mobile13602726044/ 18933311537
Tel:86-760-88589636  Fax:86-760-88589689 
地址:中山市火炬开发区兴业路实训楼15 
中山共享光电真空技术有限公司
Felight Vacuum System Co.,LTD
Address:Floor 5, Building 1,Xingye Road, Torch Zone, Zhongshan City,Guangdong Province,China
 
Emailleybold@vip.126.com         turbopump@vip.126.com
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生产行业,平板及光电显示器行业,分析仪器及科研行业提供上等的Pfeiffer IMR265真空规管维修服务。
 
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