VARIAN TPS Compact Dry TV81M Turbo Pump Station 涡轮分子泵机组的技术指标如下:
The new TPS-Compact is a dry high vacuum turbo molecular pumping system. The TPS-Compact can be ordered with the Turbo-V81 MacroTorr (maximum pumping speed of 60 l/s) or Turbo-V301 Navigator (maximum pumping speed of 220 l/s). The TPS-Compact is a totally dry high vacuum pumping system with an ultimate pressure of 1x10-9 Torr. The backing pump inside the TPS-Compact is a 60 l/min Varian IDP-3 dry scroll vacuum pump. The Varian TPS-Compact is an oil-free high performance vacuum pump system and has reduced power consumption thanks to the superior scroll pump performance. The Varian TPS-Compact is designed to meet demanding applications while being cost effective. These units are new and come with Varian factory warranty. They can be ordered for operation on either single phase 115 or 220 VAC at 50/60 Hz.
Optional Varian FRG-700 full ranges (active pirani and inverted-magnetron gauge) are available which can measure vacuum pressure from atmosphere to 3.8x10-9 Torr. Varian MiniTask, TPS Compact, and Varian AG turbo pump controllers can control the FRG-700 gauges where the pressure reading is displayed on the front of the device. These gauge interfaces with a built in display on the front of the TPS-Compact unit, pressure readout can be displayed in mbar, Torr, or Pascal. We also offer full range gauge kits; which include the Varian FRG-700 active pirani and inverted magnetron gauge, cable for gauge connection, and vacuum tee with connecting hardware.
瓦里安分子泵组可以搭配Varian FRG-700复合真空规管:

Felight Vacuum System Co.,LTD 专业维修瓦里安分子泵组,我司针常瓦里安分子泵组内核心的Varian TV81-M涡轮分子维修保养内容如下:
*超声波**清洗转/定子叶片及腔体 并烘干
*更换了全套原装进口陶瓷轴承,油棉及密封件等损耗品
*马达线圈阻值测量,转子定子间隙测量
*根据ISO1940/1& ANSI S2.19,调整测试动平衡至G0.16标准
*测试0-80000rpm启动时间<3分钟
*测试极限真空值<1.0*10-7mbar
*持续模拟生产现场测试24小时
*0-20KHz震动频谱加速度分析
*6000-80000rpm全转速动平衡分析及校准
涡轮分子泵维修是件非常专业细致的工作,专心专业的中山共享人,本着全心全意的精神,为客户提供尽善尽美的服务。中山共享从事涡轮分子泵维修已6个年头,但却没有专门的业务人员,也无意去招聘业务人员,我们的非常多的顾客都是原有的客户帮我们介绍的,在此中山共享光电真空技术有限公司全体同仁,对支持帮助过我们的朋友表示万分的感谢
中山共享光电真空技术有限公司可以维修的瓦里安分子泵的规格和型号有:
Varian Turbo-V60, Varian V60
Varian Turbo-V70, Varian V70
Varian Turbo-V70D, Varian V70D
Varian Turbo-V70LP, Varian V70LP
Varian Turbo-V80A, Varian V80A
Varian Turbo-V81T Varian TV81T
Varian Turbo-V81M Varian TV81M
Varian Turbo-V150HT Varian TV150HT
Varian Turbo-V200A Varian V200A
Varian Turbo-V250 Varian V250
Varian Turbo-V300HT Varian V300HT
Varian Turbo-V450 Varian V450
Varian Turbo-V550 Varian V550
Varian Turbo-V551 Varian V551
Varian Turbo-V700HT Varian V700HT
Varian Turbo-V1000 Varian V1000
Varian Turbo-V1000HT Varian V1000HT
Varian Turbo-V1800 Varian V1800
Varian Turbo-V1800A Varian V1800A
Varian Turbo-V2000HT Varian V2000HT
Varian Turvo-V300HT Varian TV300HT
Varian Turbo-V141 Varian TV141
Varian Turbo-V301 Varian TV301
Varian Turbo-V551 Varian TV551
Varian Turbo-V701 Varian TV701
Varian Turbo-V801 Varian TV801
Varian Turbo-V1001 Varian TV1001
Varian Turbo-V2KG Varian TV2KG
Varian TPS Comact Dry Turbo Pumping System 的技术指标如下:

有任何需要Varian Mini Task AG81 Turbo Pump Station分子泵组的,请随时联系我们:
联系人:
徐中武 Mobile:13602726044/ 18933311537
Tel:86-760-88589636 Fax:86-760-88589689
地址:中山市火炬开发区兴业路实训楼1栋5楼
中山共享光电真空技术有限公司
Felight Vacuum System Co.,LTD
Address:Floor 5, Building 1,Xingye Road, Torch Zone, Zhongshan City,Guangdong Province,China
Email:leybold@vip.126.com turbopump@vip.126.com
中山共享光电秉承"专心专业全心全意尽善尽美",竭诚为光学镀膜行业,光磁存储行业,半导体
生产行业,平板及光电显示器行业,分析仪器及科研行业提供上等的瓦里安分子泵组维修服务。
Nothing is Everything 专心 专业 全心 全意 尽善 尽美
以上文字及图片,中山共享光电真空技术有限公司版权所有,严禁盗用,违者法办